Automating Code Generation for Semiconductor Equipment Control from Developer Utterances with LLMs

Semiconductors form the backbone of modern electronics, with their manufacturing and testing relying on highly specialized equipment and domain-specific programming languages. Equipment languages such as the Algorithmic Pattern Generator (ALPG) are critical for precise hardware control but are challenging to program due to their low-level syntax and steep learning curve. While large language models (LLMs) have shown promise in generating high-level code from natural language, their effectiveness on low-level equipment languages remains limited. To address this, we propose Progressive Knowledge Enhancement (PKE), a novel multi-stage prompting framework that progressively extracts and activates the latent knowledge within LLMs, guiding them from simple to complex examples without extensive fine-tuning. Empirical evaluation on an industrial ALPG dataset shows that PKE significantly outperforms standard prompting and surpasses state-of-the-art methods in generating correct ALPG code, achieving 11.1\% and 15.2\% higher exact match scores compared to the second-best technique. Further analysis of individual components confirms that progressive knowledge extraction based on difficulty enhances accuracy. Our study offer a practical approach to boosting LLM capabilities for specialized low-level programming, supporting greater productivity in semiconductor software development.